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A T I P D o c u m en t I D 0 7 1 1 2 8 R I C M A N 2 0 0 7...

ATIP07.038 International Workshop on Innovation & Commercialization of Micro & Nanotechnology (ICMAN2007)...

ATIP/China...

Copyright (c) 2007 by the Asian Technology Information Program (ATIP) This material may not be published, modified or otherwise redistributed in whole or part, in any form, without prior approval by ATIP, which reserves all rights....

Micro-system technology (Micro), Nanotechnology, Information Technology (IT), and Biotechnology will dominate engineering and scientific activities in the future. Micromachining is an extended integrated circuit (IC) fabrication technology based on deep etching, anodic bonding, and other advanced process technologies. It is used to produce value-added micro electromechanical systems (MEMS), which have multiple functions molecular-level nanomachining can be also combined with this technology and is called nano electromechanical systems (NEMS), which includes applications that utilize carbon nanotubes (CNTs), for example. The current status of innovation and commercialization of Micro & Nanotechnology in China is surveyed in this report, based on the First International Workshop on Innovation & Commercialization of Micro & Nanotechnology (ICMAN2007), which was held on October 17-19, 2007 in Suzhou, China. Developments in Chinese MEMS/NEMS as viewed through several examples of research progress and application are also discussed, and a brief summary of Chinese MEMS/ NEMS national key projects is provided....

KEYWORDS COUNTRY DATE ...

Conferences, Government Funding, Manufacturing, MEMS, MEMS/Nano, Nanotechnology (Nano), Regional S&T Overviews, Semiconductors China...

29 November 2007...

REPORT CONTENTS 1. INTRODUCTION EXECUTIVE SUMMARY 2. OVERVIEW 3. ICMAN HIGLIGHTS...

A T I P D o c u m en t I D 0 7 1 1 2 8 R I C M A N 2 0 0 7...

CHINESE INNOVATION AND COMMERCIALIZATION OF MEMS/NEMS CONCLUSIONS...

5. OPPORTUNITY AND CHALLENGE OF CHINESE MEMS/NEMS...

1. INTRODUCTION...

Micro-system technology (Micro), Nanotechnology, Information Technology (IT), and Biotechnology will dominate engineering and scientific activities in the future. Micromachining is an extended integrated circuit (IC) fabrication technology based on deep etching, anodic bonding, and other advanced process technologies. It is used to produce value-added micro electromechanical systems (MEMS), which have multiple functions molecular-level nanomachining can be also combined with this t...

Document Keywords

071129AR ATIP07.038 International Workshop on Innovation & Commercialization of Micro & Nanotechnology (ICMAN2007).pdf Download PDF index option com jdownloads itemid 83 task view download cid 9140

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