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Printed in U.S.A., Copyright 2000. Penton Media, Inc. All rights reserved. Machine Design (ISSN 00249114) is published by Penton Media, Inc., 1100 Superior Ave., Cleveland, OH 44114-2543. Editorial content is indexed in the Applied Science Technology Index, the Engineering Index, SciSearch and Research Alert. Microfilm copies available from University Microfilms, Ann Arbor, MI 48106. Fax (313) 665-5022. Permission to photocopy is granted for users registered with the Copyright Clearance Center (CCC) Inc. to photocopy any article, with the exception of those for which separate ownership is indicated on the first page of the article, provided that the base fee of $1.25 per copy of the article, plus $.60 per page is paid to CCC, 222 Rosewood Dr., Danvers, MA 01923 (Code No. 00249114/99 $1.25 + .60). Permission to reprint Barbara LoSchiavo Purchased reprints Phyllis Dixon (216-696-7000, ext. 9607) Advertising Materials Advertising Dept., MACHINE DESIGN, 1100 Superior Ave., Cleveland, OH 44114-2543, 216-6967000. Inserts should be sent to MACHINE DESIGN, Penton Press, 680 N. Rocky River Dr., Berea, OH 44017-1691....

ELECTRONIC...

Edited by John R. Gyorki...

SERVOMOTORS TAKE PIEZOCERAMIC TRANSDUCERS FOR A RIDE...

Piezoceramic transducers cascaded with servomotors for motion control provide stable systems with unlimited travel and micron positioning....

JACOB TAL President Galil Motion Control Mountain View, Calif....

Fine positioning, PZT driven slide assembly Top stage Coarse positioning, linear servomotor assembly...

Bottom stage...

A typical compound motion control stage for one axis contains a linear servomotor for coarse positioning, and a PZT riding on its table for fine positioning. The servomotor drives to the approximate position and locks in place, while the PZT moves to the final commanded position, within a resolution as small as 5 nm. PZT. The combination has proven successful in critical positioning systems such as those for manufacturing semiconductor wafers. proportional acceleration. It also shows that motor position is the second integral of acceleration. But two integrators in a control loop make the system inherently unstable. Methods used for compensating and stabilizing such a system include modifying the dynamic response with digital filters. This reduces the loop delay. Try compensating with high-pass filters first. Because of the two integrators, it's necessary to include both a proportional and derivative term in the filter to moderate the integrat...

Document Keywords

Machine Design - "Servo Motors Take Piezoceramic Transducers for a Ride" learning articles md120999

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