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CLEANROOM ENERGY OPTIMIZATION METHODS Randy Schrecengost, P.E. Senior Project Manager / Mechanical Engineer Austin, Texas Phil Naughton Senior Member, Motorola SPS Technical Staff Motorola Austin, Texas Roadmap for Semiconductors has energy goals on the roadmap for power per unit of silicon processed the World Semiconductor Council has policy for energy reduction, numerous publications, workshops, and seminars touting need for energy reduction. There is no longer any question that cutting energy usage makes good business sense, especially given rate increases being experienced in many parts of the country. The purpose of this article is to inform the reader. Whereas, the obvious benefits for energy conservation policies are mainly ecological corporations with vision can implement policies that also contribute significantly to the bottom line. Semiconductor Cleanroom Energy Based upon surveys the Semiconductor 2 2 industry has over 12,800,000 ft (1,190,000 m ) of cleanroom space in the United States varying in cleanliness from Class M1 (ISO Class 3) to Class M6 (ISO Class 9). These cleanrooms have recirculation air handlers moving millions of cubic feet (cubic meters) of air to transport contamination out of the cleanroom and maintain the room's cleanliness. Whereas, many in the semiconductor industry are implementing energy conservation policies this is relatively new philosophy for many companies. Even the most aggressive of energy efficient semiconductor factories may use over 450 kWh of energy for every 200 mm wafer processed and the typical semiconductor factory uses enough electricity to serve over 7500 homes and will spend over $1,000,000 per month for electricity during peak usage periods of the summer. Yet, electrical costs still represent less than 5% of the total operating cost for today's 200 and 300 mm factories hindering investments in capital projects to improve energy efficiency. Semiconductor Factory Characteristics Semiconductor factories, referred to as wafer fabs or just fabs, employ several types of cleanrooms, clean support spaces, and non clean spaces. The specifics of semiconductor...

ABSTRACT The design and operation of semiconductor cleanrooms play an important role in the advancement of many of today's technology needs as the use of microelectronic products become engrained in our society. Cleanroom construction has averaged double-digit growth through the 1990's and into early 2000. Advances in factory technology...

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